A one-dimensional (1D) photonic crystal (PC) slot waveguide was proposed and experimentally demonstrated for integrated silicon-organic hybrid modulators. The 1D PC slot waveguide consists of a conventional silicon slot waveguide with periodic rectangular teeth on its two rails. This structure takes advantage of large mode overlap in a conventional slot waveguide and the slow light enhancement from the PC structure. Its simple geometry makes it resistant to fabrication imperfections and helps reduce the propagation loss. The observed effective EO coefficient in an actual Mach-Zehnder interferometer modulator is as high as 490 pm/V owing to slow light effect.
Hai Yan, Xiaochuan Xu, Chi-Jui Chung, Harish Subbaraman, Zeyu Pan, Swapnajit Chakravarty, and Ray T. Chen, "One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators," Proc. SPIE 10109, Optical Interconnects XVII, 101090O (Presented at SPIE OPTO: January 31, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2253154.
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