Scanning white light interferometry (SWLI) is a label free optical 3D imaging modality with a vertical sensitivity of a few Ångströms (Å). However, this optical far-field system, is laterally diffraction limited and resolves only a few hundred nanometers. We overcome this limit with microspheres that each produces a photonic nanojet. Thus sub- 100 nm features can laterally be resolved. To validate the performance of Photonic nanoJet based Interferometry (PJI) we compared it to techniques that provide sub-100 nm lateral resolution; Super-Resolution SWLI, atomic force microscope, and scanning electron microscope. We used a recordable Blu-ray disc as sample. Such a disc features a grooved surface topology with heights in the range of 20 nm and with distinguishable sub-100 nm lateral features that are unresolved by diffraction limited optics. We achieved agreement between all three measurement devices across lateral and vertical dimensions.
Anton Nolvi, Edward Hæggström, Kim Grundström, and Ivan Kassamakov, "3D label-free super-resolution imaging," Proc. SPIE 10110, Photonic Instrumentation Engineering IV, 101100L (Presented at SPIE OPTO: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2250260.
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