The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ~980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.
Erik Haglund, Johan S. Gustavsson, Wayne V. Sorin, Jörgen Bengtsson, David Fattal, Åsa Haglund, Michael Tan, and Anders Larsson, "Multi-wavelength VCSEL arrays using high-contrast gratings," Proc. SPIE 10113, High Contrast Metastructures VI, 101130B (Presented at SPIE OPTO: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2256348.
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