A new material pairing is presented for the realisation of sub-wavelength graings in this work and has been used to realise high contrast gratings which operate at wavelengths of 10 μm and greater. The chosen material pairing overcomes the absorption issue which prevents the popular Si/SiO2 pairing from being useful at wavelengths above 6 μm. The obstacles that exist with the currently used grating materials for this wavelength range are described and it is outlined how the chosen materials overcome these issues. It is numerically demonstrated that gratings utilising these materials are capable of wideband high reflectivity. The gratings were fabricated using standard optical photolithography only and it is shown experimentally that the spectral response of gratings which were fabricated show good agreement with theoretically predicted performance
Brian Hogan, Stephen P. Hegarty, Liam Lewis, Javier Romero Vivas, Tomasz Ochalski, and Guillaume Huyet, "Sub-wavelength gratings for mid-infrared wavlength range around 10 microns," Proc. SPIE 10113, High Contrast Metastructures VI, 101130D (Presented at SPIE OPTO: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2251937.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon