In this paper we present a 2D raster scanning quasi-static/resonant micro mirror being controlled in both axes in closed-loop with on-chip piezo-resistive sensor feedback. While the resonant axis oscillates with a given frequency, the quasi-static axis allows static as well as dynamic deflection up to its eigenfrequency because of its staggered vertical comb (SVC) drive arrangement. Due to the high quality factor of the very low damped spring-masssystem, an adapted trajectory planning using jerk limitation is applied for the quasi-static axis . Nevertheless, inaccuracies of the applied nonlinear micro mirror model and external disturbances lead to undesired residual oscillation in open-loop control mode. To achieve high precise and fast beam positioning, we implement a flatness-based control algorithm with feedback to on-chip piezo-resistive deflection sensors. In comparison to previous work [2, 3], we developed a micro controller setup for driving the microscanner, that is equipped with an analog Bessel filter increasing the sensor signal quality significantly. In this study we demonstrate a small size and low power micro mirror driver including high-voltage generation and a microcontroller for real-time control as well as a head circuit board for high resolution sensing. We discuss experimental results of open-loop and closed-loop control for 2D raster scanning operation. Finally, the outlook is given to the intrinsic capability to compensate temperature drifts influencing the piezo-resistive sensor signal.
Richard Schroedter, Markus Schwarzenberg, André Dreyhaupt, Robert Barth, Thilo Sandner, and Klaus Janschek, "Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback," Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 1011605 (Presented at SPIE OPTO: January 31, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2251802.
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