In this work, we report carbon dioxide gas sensing in the ambient air in the mid-infrared range around 4250 nm using MEMS FTIR spectrometer. The core engine of the spectrometer is a scanning Michelson interferometer fabricated using deep etching technology on silicon-on-insulator wafer. The measured Signal-to-Noise Ratio (SNR) is 24 dB at a wavelength of 4250 nm and the spectral resolution is about 60 cm-1. A free-space gas cell using CaF2 lenses with lightgas interaction lengths of 12 cm and 120 cm is demonstrated. The results demonstrate about 400 ppm concentration detection in the ambient air. The theoretical sensitivity limit based on the achieved SNR and resolution is about 15 ppm.
Mazen Erfan, Ahmed A. Elsayed, Yasser M. Sabry, Bassem Mortada, Khaled Sharaf, and Diaa Khalil, "Environmental mid-infrared gas sensing using MEMS FTIR spectrometer," Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160L (Presented at SPIE OPTO: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2251345.
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