We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.
Kyung Woon Lee, Jinsik Kim, Dong-ho Lee, Myung-Sic Chae, Kyo Seon Hwang, and Jung Ho Park, "Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid," Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160P (Presented at SPIE OPTO: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2251817.
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