We have designed and fabricated single mode proton-implanted photonic crystal vertical-cavity surface-emitting lasers and subsequently performed DC and small signal modulation analysis. Impedance characteristics and electrical parasitics are studied for various photonic crystal designs to understand factors which limit high speed modulation. Photonic crystal designs are found to have low differential resistance, but high parasitic capacitance. By including a diffusion capacitance term in the modulation response equation, scattering parameter fitting suggests the diffusion capacitance to be the limiting factor of intensity modulation. Extracted parameters from DC, impedance, and modulation response measurements are cross-checked to verify accuracy.
Harshil Dave, Stewart T. M. Fryslie, José E. Schutt-Ainé, and Kent D. Choquette, "Modulation enhancements for photonic crystal VCSELs," Proc. SPIE 10122, Vertical-Cavity Surface-Emitting Lasers XXI, 1012207 (Presented at SPIE OPTO: February 01, 2017; Published: 15 February 2017); https://doi.org/10.1117/12.2256993.
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