Mid-infrared (MIR; 3-20 μm) sensor technology is increasingly applied in environmental analysis, process monitoring and biodiagnostics due to the inherent molecular specificity enabling the discrimination of molecular components at ppm-ppb concentration levels. Recently emerging strategies taking advantage of innovative waveguide technologies including substrate-integrated hollow waveguides for detecting vapor phase media, and thin-film planar waveguides for analyzing liquid or solid state samples in combination with highly efficient light sources including quantum cascade and interband cascade lasers facilitate the development of compact and robust MIR on-chip sensing platforms for label-free chem/bio sensing and diagnostics.
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