Conditions of fabrication of first order distributed-feedback surface gratings designed for single-mode Al0.45Ga0.55As/GaAs quantum cascades lasers with the emission wavelength of about 10μm are presented. The 1 μm-deep rectangular-shaped gratings with the period of about 1.55 μm and duty cycle in the range of 65-71% made by the standard photolithography are demonstrated. The wavenumber difference of about 7 cm-1 at 77 K is observed for the radiation emitted by lasers fabricated from the same epitaxial structure with ridge widths in the range of 15-25 μm. Moreover, the emission wavelength of the lasers could be tuned with temperature at a rate of 1 nm/K in the temperature range of 77-120 K. The full width at half maximum of the emitted spectra is ~ 0.4 cm-1.
Anna Szerling, Renata Kruszka, Kamil Kosiel, Marek Wzorek, Krystyna Gołaszewska, Artur Trajnerowicz, Piotr Karbownik, Maciej Kuc, Tomasz Czyszanowski, Michał Walczakowski, and Norbert Palka, "Al0.45Ga0.55As/GaAs-based single-mode distributed-feedback quantum-cascade lasers with surface gratings," Proc. SPIE 10123, Novel In-Plane Semiconductor Lasers XVI, 101231M (Presented at SPIE OPTO: February 02, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2252791.
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