The investigation of integrated circuits (ICs), such as microcontrollers (MCUs) and system on a chip (SoCs) devices is a topic with growing interests. The need for fast and non-destructive imaging methods is given by the increasing importance of hardware Trojans, reverse engineering and further security related analysis of integrated cryptographic devices. In the field of side-channel attacks, for instance, the precise spot for laser fault attacks is important and could be determined by using modern high resolution microscopy methods. Digital holographic microscopy (DHM) is a promising technique to achieve high resolution phase images of surface structures. These phase images provide information about the change of the refractive index in the media and the topography. For enabling a high phase stability, we use the common-path geometry to create the interference pattern. The interference pattern, or hologram, is captured with a water cooled sCMOS camera. This provides a fast readout while maintaining a low level of noise. A challenge for these types of holograms is the interference of the reflected waves from the different interfaces inside the media. To distinguish between the phase signals from the buried layer and the surface reflection we use specific numeric filters. For demonstrating the performance of our setup we show results with devices under test (DUT), using a 1064 nm laser diode as light source. The DUTs are modern microcontrollers thinned to different levels of thickness of the Si-substrate. The effect of the numeric filter compared to unfiltered images is analyzed.
Markus Finkeldey, Lena Göring, Falk Schellenberg, Nils C. Gerhardt, and Martin Hofmann, "Backside imaging of a microcontroller with common-path digital holography," Proc. SPIE 10127, Practical Holography XXXI: Materials and Applications, 1012704 (Presented at SPIE OPTO: January 30, 2017; Published: 6 April 2017); https://doi.org/10.1117/12.2250903.
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