We present a double cladding, high-mesa-type waveguide UTC photodetector with an improved the responsivity. In this device structure, an InGaAs thin core layer was sandwiched by p-InP/InGaAsP and n-InP/InGaAsP cladding layers, including a UTC structure, in order to obtain a good optical coupling between the waveguide and the fiber. By comparing the resulting mode field with that obtained with a single cladding layer structure, we confirmed that the vertical mode field was enlarged. Without a spot size converter, the measured responsivity was as high as 0.6 A/W at 1550 nm, which suggests a responsivity three times higher than that of back-illuminated structures, and higher responsivity than that of previous reports. A high frequency performance (f3dB = 100 GHz) was also measured. The device structure, including the layer, doping level conditions, and optical fiber coupling results are discussed, and its performance is characterized in detail.
T. Umezawa, K. Akahane, A. Matsumoto, A. Kanno, N. Yamamoto, and T. Kawanishi, "High-responsivity 100GHz waveguide UTC photodetector," Proc. SPIE 10128, Broadband Access Communication Technologies XI, 1012807 (Presented at SPIE OPTO: February 01, 2017; Published: 28 January 2017); https://doi.org/10.1117/12.2250246.
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