We introduce a set of designed tools for the analysis of lithography patterns and nano structures. The classical metrological analysis of these objects has the drawbacks of being time consuming, requiring manual tuning and lacking robustness and user friendliness. With the goal of improving the current situation, we propose new image processing tools at different levels: semi automatic, automatic and machine-learning enhanced tools. The complete set of tools has been integrated into a software platform designed to transform the lab into a virtual fab. The underlying idea is to master nano processes at the research and development level by accelerating the access to knowledge and hence speed up the implementation in product lines.
Alexandre Dervillé, Julien Baderot, Guilhem Bernard, Johann Foucher, Hanna Grönqvist, Aurélien Labrosse, Sergio Martinez, and Yann Zimmermann, "Designed tools for analysis of lithography patterns and nanostructures," Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450I (Presented at SPIE Advanced Lithography: February 28, 2017; Published: 28 March 2017); https://doi.org/10.1117/12.2258612.
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