Efrain Altamirano-Sánchez, "Low-frequency roughness mitigation on N7/N5 fin patterning (Conference Presentation)," Proc. SPIE 10149, Advanced Etch Technology for Nanopatterning VI, 101490A (Presented at SPIE Advanced Lithography: February 28, 2017; Published: 27 April 2017); https://doi.org/10.1117/12.2263468.5402356427001.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the conference proceedings. They include the speaker's narration along with a video recording of the presentation slides and animations. Many conference presentations also include full-text papers. Search and browse our growing collection of more than 14,000 conference presentations, including many plenary and keynote presentations.
Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon