From Event: SPIE Commercial + Scientific Sensing and Imaging, 2017
There is a strong commercial incentive for characterizing power semiconductor devices during manufacture non-destructively. One area of concern are the stresses in the material introduced during manufacture by processes such as wafer thinning and chip separation. Raman spectroscopy can be used to measure stress in different semiconductor materials directly, non-destructively and quantitatively. Here, we describe Raman measurements on two semiconductor materials: silicon and silicon carbide. Measurements of silicon carbide are made on silicon carbide wafers; stress and material analyses of silicon are performed on: (i.) silicon wafers that had undergone different wafer thinning methods and (ii) along die sidewalls formed by mechanical and laser dicing. Our measurements demonstrate that micro-Raman spectroscopy is a feasible method for both measuring stress in thin wafers and for optimizing the thin wafer processes.
M. De Biasio, M. Kraft, E. Geier, B. Goller, Ch. Bergmann, R. Esteve, M. Cerezuela-Barreto, D. Lewke, M. Schellenberger, and M. Roesner, "Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing," Proc. SPIE 10210, Next-Generation Spectroscopic Technologies X, 102100U (Presented at SPIE Commercial + Scientific Sensing and Imaging: April 11, 2017; Published: 3 May 2017); https://doi.org/10.1117/12.2259927.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the conference proceedings. They include the speaker's narration along with a video recording of the presentation slides and animations. Many conference presentations also include full-text papers. Search and browse our growing collection of more than 12,000 conference presentations, including many plenary and keynote presentations.
Monte Carlo based light propagation models to improve efficacy of biophotonics based therapeutics of hollow organs and solid tumours including photodynamic therapy and photobiomodulation (Conference Presentation)