From Event: SPIE Commercial + Scientific Sensing and Imaging, 2017
Diamond turning is the powerful fabrication method for optics. Current process is very time consuming due to the lack of on-machine metrology. In this talk, we will first discuss the challenges and requirement of in-situ metrology, then we will present chromatic confocal on-machine metrology system developed in our lab and demonstrate its performance.
Hsiang Nan Cheng, Katherine Overend, Yu Zhang, and Rongguang Liang, "On-machine metrology system (Conference Presentation)," Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200G (Presented at SPIE Commercial + Scientific Sensing and Imaging: April 13, 2017; Published: 6 June 2017); https://doi.org/10.1117/12.2264882.5460687080001.
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