We present for the first time second harmonic generation in amorphous stoichiometric Si3N4 waveguides grown via low pressure chemical vapor deposition. An effective second-order susceptibility (χ (2)) is established via the coherent photogalvanic effect. A waveguide was designed to phase match a horizontally (parallel to the waveguide width) polarized hybrid EH00 mode at 1064 nm with the higher-order hybrid transverse EH02 mode at 532 nm. A mode-locked laser delivering 6.2-ps pulses at 1064 nm with a repetition rate of 20 MHz was used as pump. When pumped with a constant average power, it was found that the photoinduced χ (2) is established over a time of the order of 1000 s in as-manufactured waveguides, during which the second harmonic signal grows from below noise to a saturation value. The life-time of the photoinduced χ (2) is at least a week. In steady state, we obtain a maximum conversion efficiency close to 0.4% for an average pump power of 13 mW inside the waveguide. The effective second-order susceptibility is found to be 8.6 pm/V.
Marco A. G. Porcel, Jesse Mak, Caterina Taballione, Victoria K. Schermerhorn, Jörn P. Epping, Peter J. M. van der Slot, and Klaus-J. Boller, "Photoinduced χ(2) for second harmonic generation in stoichiometric silicon nitride waveguides," Proc. SPIE 10228, Nonlinear Optics and Applications X, 102280R (Presented at SPIE Optics + Optoelectronics: April 25, 2017; Published: 16 May 2017); https://doi.org/10.1117/12.2265797.
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