In order to improve resolution at energies below 9 keV, our group designed similar spectrometer (in cooperation with PREVAC) but instead of primary polycapillary optics we applied single bounce metallic capillaries optics , designed and manufactured in our Laboratory. The vacuum chumber is currently under construction and is expected to be fully operational in September this year. Single bounce gold capillaries with elliptic internal shape have recently been redesigned and developed in our Laboratory. Surface roughness was reduced up to 0.5 nm and slope error to 0.3 mrad. For these capillaries an expected depth resolution varies from 3 μm (1 keV) and 10 µm for 9 keV (Cu-Kα). The spectrometer equipped with gold capillaries offers the possibility of elemental analysis with better depth resolution than is offerred by glass polycapillaries at energies below 9 keV. Furthermore, we will compare the capabilities and limitations of this spectrometer with others, that use laboratory and/or synchrotron sources.
Acknowledgments: This work was supported and co-funded by the European Union as part of the Operational Programme Development of Eastern Poland for 2007–2013, Priority I Innovative Economy, Measure I.3. Support for Innovations and The National Centre for Research and Development, Project no. TANGO1,267102/NCBR/2015