After decades of research and more than ten years of successful production in very high volumes Silicon MEMS microphones are mature and unbeatable in form factor and robustness. Audio applications such as video, noise cancellation and speech recognition are key differentiators in smart phones. Microphones with low self-noise enable those functions. Backplate-free microphones enter the signal to noise ratios above 70dB(A). This talk will describe state of the art MEMS technology of Infineon Technologies. An outlook on future technologies such as the comb sensor microphone will be given.
Alfons Dehé, "MEMS microphone innovations towards high signal to noise ratios (Conference Presentation)," Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024602 (Presented at SPIE Microtechnologies: May 09, 2017; Published: 16 June 2017); https://doi.org/10.1117/12.2267872.5470997509001.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon