This work reports on the design, fabrication and performance of a novel light-actuated wax microvalve. This valve is capable of multiple-actuation (30 and 15 open-close cycles in air and water, correspondingly), shows a fast response (≤500 ms) and has a low energy-consumption per actuation (≤1 J). The valve is inherently latched in both open and close states and is leak-proof to at least 80 kPa. It is actuated (both open and close) by light pulses from an external LED. Many valves (< 100 cm2) can be easily integrated in a single chip with a wax microfluidics technology. Fabrication is based on a low-cost and fast prototyping process compatible with the presence of temperature sensitive biocomponents.
M. Díaz-González, G. Boix, C. Fernández-Sánchez, and A. Baldi, "Wax microfluidics light-addressable valve with multiple actuation," Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460G (Presented at SPIE Microtechnologies: May 09, 2017; Published: 30 May 2017); https://doi.org/10.1117/12.2264919.
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