In these days industry 4.0 resounded throughout the land and means the fourth industrial revolution. The industry has to tackle the task of a flexible and customer-oriented production. Therefor the need of sensor systems for the measurement of temperature and load, the two most important categories in production, is rising. For getting the real specification during the production process the integration of sensor elements in high load regions of machinery is very important. Thus wear resistant thin film sensor systems directly applied onto the surface of plant components are in development. These multilayer systems combine excellent wear resistance with sensory behaviour. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.
Saskia Biehl, Nancy Paetsch, and Eike Meyer-Kornblum, "Thin film system with integrated load and temperature sensors for the technical application in deep drawing process," Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460O (Presented at SPIE Microtechnologies: May 09, 2017; Published: 31 May 2017); https://doi.org/10.1117/12.2265694.
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