In this study, we present theoretical analysis and numerical results on a simple technique for extracting unknown model parameters for MEMS electrostatic energy harvesters. We show that the frequency response can be utilized in a least-squares minimization scheme to estimate the damping coefficient, mechanical stiffness and transducer/load parasitic capacitances. The accuracy of the method is tested by application to simulated cases of linear and non-linear harvesters. A single data sweep from such a pseudo-experiment suffices to determine the unknown parameters of the electromechanical model with accuracy. The method is shown to work satisfactorily for both linear and nonlinear devices.
Binh Duc Truong, Cuong Phu Le, and Einar Halvorsen, "Parameter identification from frequency response of MEMS energy harvesters," Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460U (Presented at SPIE Microtechnologies: May 10, 2017; Published: 2 June 2017); https://doi.org/10.1117/12.2264094.
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