Silicon sub-wavelength structures have found widespread applications in devices ranging from fiber-to-chip couplers to spectrometers. So far, these structures have been mainly used to engineer the local refractive index. Here we focus on two further applications. We describe how to engineer the waveguide electromagnetic field distribution for enhanced evanescent field sensing, predicting a 6-fold enhancement of the sensitivity compared to conventional waveguides. We furthermore report experimental results on broadband multimode interference couplers, which, by leveraging the inherent anisotropy of the sub-wavelength structures, achieve virtually perfect operation over a bandwidth of more than 300nm at telecom wavelengths.
Robert Halir, Juan Manuel Luque-González, Gonzalo Wangüemert-Pérez, Alejandro Ortega-Moñux, Dan-Xia Xu, Jens H. Schmid, Pavel Cheben, and Íñigo Molina-Fernández, "Silicon subwavelength structures for communications and sensing (Conference Presentation)," Proc. SPIE 10249, Integrated Photonics: Materials, Devices, and Applications IV, 1024904 (Presented at SPIE Microtechnologies: May 09, 2017; Published: 16 June 2017); https://doi.org/10.1117/12.2267644.5471030924001.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon