We present the design of a perfect light absorber using 3D metamaterial for operation in the mid IR region. The 3D
metamaterial is a metal half ring projecting normal to the substrate plane, which ensures wide-angle operation for the
direct magnetic coupling. The absorber is essentially a 3-layer architecture having the 3D metamaterial on top acting as
impedance matching layer to the surrounding medium, which ensures near zero reflection. A ground metal plane of
120nm thickness at the bottom layer cancels any transmission through the structure for incident electromagnetic field. A
dielectric spacer layer of thickness 100nm separates the top and bottom layers. The metal parts of the absorber are
realized using gold and the dielectric spacer layer is defined by SiN thin film deposited using PECVD. The 3D half rings
are formed from the lithographically defined 2D template by releasing residual stress in the thermally evaporated gold
thin film using ICP RIE of SiN sacrificial layer. We report an absorbance of more than 90% at a peak wavelength of
12.5μm with a FWHM of 2μm.
Renilkumar Mudachathi and Takuo Tanaka, "Isotropic metamaterial perfect light absorber using 3D split ring resonator in the mid IR region," Proc. SPIE 10343, Metamaterials, Metadevices, and Metasystems 2017, 1034320 (Presented at SPIE Nanoscience + Engineering: August 10, 2017; Published: 24 August 2017); https://doi.org/10.1117/12.2276967.
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