Surface plasmon polariton (SPP) provide the field enhancement and localization beyond the diffraction limit of light. By using SPP, we have numerically designed tiny resonance sensors as plasmonic integrated devices with silver or gold as metal material for near infrared region of light. We will present our recent work for the sensors. The sensors are the combination of the plasmon resonator and MIM channel plasmon waveguide with the gap of ~150 nm and the hight of ~1.5 micron. The typical area size of sensor is order of 1 square micrometers and their sensitivity for temperature or stress change is comparable to current optical sensors. We have fabricated some fundamental structure of the device by using the electron beam lithography and will show experimental optical characteristics for IR region.
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