Optical devices with features exhibiting ultra low reflectivity on the order of 1e-7 specular reflectance and 0.1% hemispherical TIR in the visible spectrum enable unique applications in astronomical research and instruments such as coronagraphs and spectrometers. Nanofabrication technologies have been developed to produce such devices with various shapes and feature dimensions to meet these requirements. Infrared reflection is also suppressed significantly with chosen wafers and processes. Very low levels of specular and scattered light are achievable over a very broad spectral band. We present some of the approaches, challenges and achieved results in producing and characterizing such surfaces and devices currently employed in laboratory testbeds and instruments. The level of blackness achievable in relation to basic material properties such as conductivity and process variables are discussed in detail.
Karl Y. Yee, Victor E. White, Kunjithapatham Balasubramanian, and Daniel J. Ryan, "Ultra low reflectivity black silicon surfaces and devices enable unique optical applications (Conference Presentation)," Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103540W (Presented at SPIE Nanoscience + Engineering: August 10, 2017; Published: 11 October 2017); https://doi.org/10.1117/12.2274409.5606333962001.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the conference proceedings. They include the speaker's narration along with a video recording of the presentation slides and animations. Many conference presentations also include full-text papers. Search and browse our growing collection of more than 14,000 conference presentations, including many plenary and keynote presentations.
Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon