We review properties of 1D and 2D resonant silicon metasurfaces based on fundamental electromagnetic resonance effects in thin periodic films. The spectral response upon transition from zero-contrast to high-contrast grating interfaces is explored. We discuss design and optimization with rigorous mathematical methods and review typical fabrication processes. New theoretical and experimental results for numerous devices are furnished. These include wideband reflectors and flat-top bandpass filters with multi-module resonant structures. The guided-mode resonance concept applies in all spectral regions, from the visible band to the microwave domain, with available low-loss materials.
Yeong Hwan Ko and Robert Magnusson, "Zero-contrast silicon-based metasurfaces: resonance physics and applications," Proc. SPIE 10356, Nanostructured Thin Films X, 103560N (Presented at SPIE Nanoscience + Engineering: August 10, 2017; Published: 30 August 2017); https://doi.org/10.1117/12.2275894.
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