From Event: SPIE Optical Engineering + Applications, 2017
In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
Zhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, and Shuhui Mo, "Geometrical error calibration in reflective surface testing based on reverse Hartmann test," Proc. SPIE 10373, Applied Optical Metrology II, 103730K (Presented at SPIE Optical Engineering + Applications: August 09, 2017; Published: 23 August 2017); https://doi.org/10.1117/12.2268372.
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