From Event: SPIE Optical Engineering + Applications, 2017
For modern synchrotron light sources, the push toward diffraction-limited and coherence-preserved beams demands accurate metrology on X-ray optics. Moreover, it is important to perform in-situ characterization and optimization of X-ray mirrors since their ultimate performance is critically dependent on the working conditions. Therefore, it is highly desirable to develop a portable metrology device, which can be easily implemented on a range of beamlines for in-situ metrology. An X-ray speckle-based portable device for in-situ metrology of synchrotron X-ray mirrors has been developed at Diamond Light Source. Ultra-high angular sensitivity is achieved by scanning the speckle generator in the X-ray beam. In addition to the compact setup and ease of implementation, a user-friendly graphical user interface has been developed to ensure that characterization and alignment of X-ray mirrors is simple and fast. The functionality and feasibility of this device is presented with representative examples.
Hongchang Wang, Yogesh Kashyap, Tunhe Zhou, and Kawal Sawhney, "Speckle-based portable device for in-situ metrology of x-ray mirrors at Diamond Light Source," Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038504 (Presented at SPIE Optical Engineering + Applications: August 06, 2017; Published: 7 September 2017); https://doi.org/10.1117/12.2274780.
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