From Event: SPIE Optical Engineering + Applications, 2017
Differential deposition, a post-fabrication figure correction technique, has the potential to significantly improve the imaging quality of grazing-incidence X-ray optics. DC magnetron sputtering is used to selectively coat the mirror in order to minimize the figure deviations. Custom vacuum chambers have been developed at NASA MSFC that will enable the implementation of the deposition on X-ray optics. A factor of two improvement has been achieved in the angular resolution of the full-shell X-ray optics with first stage correction of differential deposition. Current efforts are focused on achieving higher improvements through efficient implementation of differential deposition.
Kiranmayee Kilaru, Brian D. Ramsey, Jeffery Kolodziejczak, and Carolyn Atkins, "Improving x-ray optics via differential deposition," Proc. SPIE 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII, 103991F (Presented at SPIE Optical Engineering + Applications: August 10, 2017; Published: 29 August 2017); https://doi.org/10.1117/12.2275503.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon