Three-dimensional (3D) laser lithography has become a versatile, reliable, and widespread workhorse for fabricating 3D micro- and nanostructures. I will illustrate the current state-of-the-art by selected examples. I will emphasize our work on 3D functionalized micro-scaffolds to steer the growth of cells, 3D metamaterials with negative effective static volume compressibility, and 3D chiral micropolar mechanical metamaterials that can be seen as the counterpart of optically active materials.
Martin Wegener, "3D laser nano-printing for bio-scaffolds and metamaterials (Conference Presentation)," Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 1051910 (Presented at SPIE LASE: January 31, 2018; Published: 14 March 2018); https://doi.org/10.1117/12.2295323.5751440560001.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon