3D meso-scale structures, that can reach up to cm in overall size but retain micro- or nano-features, proved to be promising in various science fields from micro-mechanical metamaterials to photonics. In this work we present an approach of synchronizing linear positioning and galvo-scanning for efficient femtosecond 3D optical printing of objects at meso-scale. In such configuration linear stages provide stitchless structuring at nearly limitless (up to tens of cm) working area, while galvo-scanners allow to achieve translation velocities in the range of mm/scm/ s without sacrificing nano-scale positioning accuracy. The capabilities of this approach are demonstrated by fabricating mm sized but μm features retaining structures with free movable parts, scaffolds for cell growth, microlenses and photonic crystals. Provided results show that synchronization of this kind is crucial for an end goal of industrial-scale implementation of this technology.
Linas Jonušauskas, Darius Gailevičius, Sima Rekštytė, Saulius Juodkazis, and Mangirdas Malinauskas, "Synchronization of linear stages and galvo-scanners for efficient direct laser fabrication of polymeric 3D meso-scale structures," Proc. SPIE 10523, Laser 3D Manufacturing V, 105230X (Presented at SPIE LASE: February 01, 2018; Published: 26 February 2018); https://doi.org/10.1117/12.2287669.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon