We propose a rectangular resonator sensor structure with butterfly MMI coupler using SOI. It consists of the rectangular resonator, total internal reflection (TIR) mirror, and the butterfly MMI coupler. The rectangular resonator is expected to be used as bio and chemical sensors because of the advantages of using MMI coupler and the absence of bending loss unlike ring resonators. The butterfly MMI coupler can miniaturize the device compared to conventional MMI by using a linear butterfly shape instead of a square in the MMI part. The width, height, and slab height of the rib type waveguide are designed to be 1.5 μm, 1.5 μm, and 0.9 μm, respectively. This structure is designed as a single mode. When designing a TIR mirror, we considered the Goos-Hänchen shift and critical angle. We designed 3:1 MMI coupler because rectangular resonator has no bending loss. The width of MMI is designed to be 4.5 μm and we optimize the length of the butterfly MMI coupler using finite-difference time-domain (FDTD) method for higher Q-factor. It has the equal performance with conventional MMI even though the length is reduced by 1/3. As a result of the simulation, Qfactor of rectangular resonator can be obtained as 7381.
Sun-Ho Kim, Jun-Hee Park, Eudum Kim, Su-Jin Jeon, Ji-Hoon Kim, and Young-Wan Choi, "Analysis of the rectangular resonator with butterfly MMI coupler using SOI," Proc. SPIE 10526, Physics and Simulation of Optoelectronic Devices XXVI, 1052613 (Presented at SPIE OPTO: January 31, 2018; Published: 23 February 2018); https://doi.org/10.1117/12.2288093.
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