We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.
Avijit Chatterjee and Shankar Kumar Selvaraja, "Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band," Proc. SPIE 10528, Optical Components and Materials XV, 105280X (Presented at SPIE OPTO: January 31, 2018; Published: 22 February 2018); https://doi.org/10.1117/12.2290306.
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