We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.
Avijit Chatterjee and Shankar Kumar Selvaraja, "Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band," Proc. SPIE 10528, Optical Components and Materials XV, 105280X (Presented at SPIE OPTO: January 31, 2018; Published: 22 February 2018); https://doi.org/10.1117/12.2290306.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the proceedings. They include the speaker's narration with video of the slides and animations. Most include full-text papers. Interactive, searchable transcripts and closed captioning are now available for 2018 presentations, with transcripts for prior recordings added daily.
Search our growing collection of more than 16,000 conference presentations, including many plenaries and keynotes.