Group-III-nitride nanophotonics on silicon is a booming field, from the near-IR to the UV spectral range. The main interest of III-nitride nanophotonic circuits is the integration of active structures and laser sources. Laser sources with a small footprint can be obtained with microresonators formed by photonic crystals or microdisks, exhibiting quality factors up to a few thousand down to the UV-C. So far, single microdisk laser devices have been demonstrated, mostly under optical pumping. Combining microdisk lasers under electrical injection with passive devices represents a major challenge in realizing a viable III-nitride nanophotonic platform on silicon. As a first step to realize this goal, we have separately demonstrated electroluminescence from microdisks and side-coupling of microdisks to bus waveguides with outcoupling gratings in the blue spectral range. We have developed the fabrication of electrically injected microdisks with a circular p-contact on top of the disk that is connected to a larger pad via a mechanically stable metal microbridge. Blue electroluminescence is observed under current injection at room temperature. We also demonstrated high Q factor (Q > 2000) WGMs in the blue spectral range from microdisks side-coupled to bus waveguides, as measured from the luminescence of embedded InGaN quantum wells. The WGM resonances are clearly observed through outcoupling gratings following propagation in partially etched waveguides to remove quantum well absorption. Small gaps between microdisks and bus waveguides of around 100 nm are necessary for efficient coupling in the blue spectral range, which represents a major fabrication challenge. We will discuss the progress brought by these building blocks to generate future III-nitride photonic circuits.
Farsane Tabataba-Vakili, Iännis Roland, Stéphanie Rennesson, Eric Frayssinet, Julien Brault, Moustafa El Kurdi, Xavier Checoury, Bruno Paulillo, Raffaele Colombelli, Thierry Guillet, Christelle Brimont, Benjamin Damilano, Fabrice Semond, Bruno Gayral, and Philippe Boucaud, "III-nitride on silicon microdisks: electrical injection and bus waveguide side-coupling (Conference Presentation)," Proc. SPIE 10532, Gallium Nitride Materials and Devices XIII, 105321K (Presented at SPIE OPTO: February 01, 2018; Published: 14 March 2018); https://doi.org/10.1117/12.2289556.5751531014001.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon