Luxtera and TSMC have jointly developed a new generation 100Gbps/λ-capable silicon photonics platform in a commercial 300 mm CMOS line. We present process details and the performance of the photonic device library.
Roman Bruck, Yannick De Koninck, Kam-Yan Hon, Peng Sun, Marc Savanier, Subal Sahni, Gianlorenzo Masini, Scott Denton, Laurent Planchon, Thierry Pinguet, Nathaniel Rudnick, Gene Armijo, Joseph Balardeta, Brian Chase, Yuemeng Chi, Anders Dahl, Mehmet Eker, Sama Fathpour, Dennis Foltz, Steve Hovey, Steven Jackson, Wei Li, Yee Liang, Michael Mack, Gary McGee, Simon Pang, Mark Peterson, Kevin Roberson, Jeff Schramm, Chang Sohn, Kirk Stechschulte, George Vastola, Shawn Wang, Gary Wong, Kosei Yokoyama, Shuhuan Yu, Richard Zhou, Attila Mekis, and Peter De Dobbelaere, "A 100Gbps/lambda-capable silicon photonics platform," Proc. SPIE 10536, Smart Photonic and Optoelectronic Integrated Circuits XX, 1053616 (Presented at SPIE OPTO: January 31, 2018; Published: 14 March 2018); https://doi.org/10.1117/12.2288518.5751517235001.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon