Microwave photonic systems have huge potential for both existing and future applications, including radar, radiofrequency sensing and modern wireless communications due to their distinct advantages in terms of ultra-wide bandwidth, flexible tunability, and immunity to electromagnetic interference. There is a strong research trend in microwave photonic systems towards integration and miniaturization, resulting in multiple radio frequency functions on a single chip which is both compact and light weight. Thus integrated microwave photonics has attracted a lot of attentions and achieves significant improvements in last ten years. In this paper, we will review some research progresses on silicon-based integrated microwave photonics in our group, including highly efficient micro heater on silicon photonic chip, chip-scale microwave waveform generation, on-chip true time delay, and microwave photonic processing and measurement. Our schemes are all fabricated on silicon-on-insulator chips and have advantages of compactness and capability to integrate with electronic units. These chips may motivate the great application potentials in silicon-based integrated microwave photonics.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon