Surface-enhanced infrared absorption (SEIRA) is capable of identifying molecular fingerprints by resonant detection of infrared vibrational modes through the coupling with plasmonic modes of metallic nanostructures. However, SEIRA for on-chip gas sensing is still not very successful due to the intrinsically weak light-matter interaction between photons and gas molecules and the technical challenges in accumulating sufficient gas species in the vicinity of the spatially localized enhanced electric field, namely the “hot-spots”, generated through plasmonics. In this paper, we present a suspended silicon nitride (Si3N4) nano-membrane device by integrating plasmonic nano-patch gold antennas with metal-organic framework (MOF), which can largely adsorb carbon dioxide (CO2) through its nanoporous structure. Unlike conventional SEIRA sensing relying on highly localized hot-spots of plasmonic nanoantennas or nanoparticles, the device reported in this paper engineered the coupled surface plasmon polaritons in the metal-Si3N4 and metal-MOF interfaces to achieve strong optical field enhancement across the entire MOF film. We successfully demonstrated on-chip gas sensing of CO2 with more than 1,800× enhancement factors within a 2.7 μm thin film, and the detection limit was estimated to be about 52 ppm. This work proved the feasibility of developing a new type of on-chip SEIRA gas sensing using hybrid plasmonic-MOF nano-devices with miniaturized size and ultra-high sensitivity.
Xinyuan Chong, Erwen Li, Ki-Joong Kim, Yujing Zhang, Paul R. Ohodnicki, Chih-Hung Chang, and Alan X. Wang, "On-chip surface-enhanced infrared absorption for gas sensing (Conference Presentation)," Proc. SPIE 10536, Smart Photonic and Optoelectronic Integrated Circuits XX, 105361N (Presented at SPIE OPTO: February 01, 2018; Published: 14 March 2018); https://doi.org/10.1117/12.2292283.5751513312001.
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