Silicon nitride has received a lot of attention during the last ten years, for applications such as bio-photonics, tele/datacom, optical signal processing and sensing. In this paper, firstly an updated review of the state of the art of silicon nitride photonics integration platforms will be provided. Secondly, our developments on a moderate confinement Si3N4 platform in the near-infrared will be presented. Finally, our steps towards establishing a Si3N4 based platform for broadband operation spanning from visible to mid-infrared wavelengths will be introduced.
Gloria Micó, Luis A. Bru, Daniel Pastor, David Doménech, Juan Fernández, Ana Sánchez, Josep M. Cirera, Carlos Domínguez, and Pascual Muñoz, "Silicon nitride photonics: from visible to mid-infrared wavelengths," Proc. SPIE 10537, Silicon Photonics XIII, 105370B (Presented at SPIE OPTO: January 29, 2018; Published: 22 February 2018); https://doi.org/10.1117/12.2287421.
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