Optical phased array (OPA) is considered as promising device in LiDAR application. We implemented a 1x16 silicon OPA consisting of an array of p-i-n electro-optic phase shifters and thermo-optic tunable grating radiators capable of two-dimensional beam-steering. The OPA was fabricated with CMOS-compatible process using SOI wafer. The p-i-n electro-optic phase shifters were formed in OPA channels for transversal beam-steering. With an array pitch of 2 μm, we attained transversal steering up to 45.6° at 1550 nm wavelength. For longitudinal beam-steering, we employed thermo-optic tunable grating radiators with p-i-n junction. The i-region covers whole radiator array and the p- and n-doped regions are placed on the both sides of the radiator array. This structure can provide fairly uniform heating of the radiator region, shifting the overall radiation field in longitudinal direction by the thermo-optic effect. As a result, a longitudinal beam-steering up to 10.3° was achieved by forward-biasing with a power consumption of 178 mW. This result proves a possibility of wide two-dimensional beam-steering with one-dimensional OPA without using tunable light source. We confirmed that the longitudinal tuning range obtained above is corresponding to near 100 nm wavelength tuning. Our device scheme can be a cost-effective solution of the OPA and also be a solution of self-adjustment for fluctuation of the wavelength-dependent performances.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon