These arrays exhibit narrow near-unity reflectivity resonances that arise from coupling of an incident wave into a leaky waveguide mode via a grating vector that is subsequently reradiated, also known as guided mode resonances (GMRs). Simulations reveal reflectivities of >99% with full width at half maxima (FWHM) of ≈0.01 μm. We demonstrate a fabrication route for obtaining nanopillar arrays that exhibit these GMRs. We experimentally observed a GMR with an amplitude of ~0.8 for filter arrays fabricated on silicon on insulator (SOI) substrates, combined with Fabry-Perot interference that stems from the underlying silicon layer.
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