The direct write of photonic elements onto substrates presents opportunities for rapid prototyping and novel sensing architectures in domains inaccessible to traditional lithography. In particular, focussed electron beam induced deposition (FEBID) of platinum is a convenient technology for such direct-write applications with the advantage of relatively controlled deposition parameters and sub-10 nm resolution. One issue for FEBID of platinum is that the precursor gas contains a relatively high carbon content, which in turn leads to carbonaceous deposits in the final structure. Here we explore the creation of plasmonic nanoantennae using FEBID platinum. We compare as-deposited and annealed antenna with heights of 40 nm and 56 nm, showing the effect of annealing on the carbon concentration and hence the optical properties. These results are compared with modelling using Mie scattering theory. Our results show that FEBID platinum is a useful material for the direct-write of plasmonic nanoantenna.
Ashleigh H. Heffernan, Daniel Stavrevski, Ivan Maksymov, Roman Kostecki, Heike Ebendorff-Heidepriem, Andrew D. Greentree, and Brant C. Gibson, "Focussed electron beam induced deposition of platinum plasmonic antennae," Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 105440J (Presented at SPIE OPTO: January 29, 2018; Published: 22 February 2018); https://doi.org/10.1117/12.2289380.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the conference proceedings. They include the speaker's narration along with a video recording of the presentation slides and animations. Many conference presentations also include full-text papers. Search and browse our growing collection of more than 14,000 conference presentations, including many plenary and keynote presentations.
Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon