We report high resolution (873 x 500), active-matrix, GaN-based LED microdisplays with a pixel pitch of 10 μm. They exhibit the highest resolution for the smallest pixel pitch ever reported for GaN microdisplays. High-density GaN μLED arrays were first patterned at 10-μm pitch on sapphire substrates. Arrays were then hybridized on CMOS active-matrix using the microtube technology. Blue and green monochrome prototypes have been realized. Full video, high-resolution images have been obtained. The performance of these GaN-based microdisplays make them suitable for a wide range of applications from augmented reality and head-up displays to pico- and compact projectors.
François Templier, Ludovic Dupré, Bertrand Dupont, Anis Daami, Bernard Aventurier, Franck Henry, Denis Sarrasin, Sébastien Renet, Frederic Berger, François Olivier, and Lydie Mathieu, "High-resolution active-matrix 10-μm pixel-pitch GaN LED microdisplays for augmented reality applications," Proc. SPIE 10556, Advances in Display Technologies VIII, 105560I (Presented at SPIE OPTO: February 01, 2018; Published: 19 February 2018); https://doi.org/10.1117/12.2294527.
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