While 0.33NA EUV systems are readying to start volume manufacturing, ASML and Zeiss are ramping up development activities on a 0.55NA EUV exposure tool, extending Moore’s law throughout the next decade. A novel, anamorphic lens design, has been developed to provide the NA; this lens will be paired with new, faster stages and more accurate sensors and the tight focus and overlay control needed for future process nodes. This paper presents an overview of the target specifications, key technology innovations and imaging simulations demonstrating the advantages as compared to 0.33NA and showing the capabilities of ASML’s next generation EUV systems.
Jan van Schoot, Kars Troost, Frank Bornebroek, Rob van Ballegoij, Sjoerd Lok, Peter Krabbendam, Judon Stoeldraijer, Jos Benschop, Jo Finders, Hans Meiling, Eelco van Setten, Bernhard Kneer, Peter Kuerz, Winfried Kaiser, Tilmann Heil, and Sascha Migura, "The future of EUV lithography: continuing Moore's Law into the next decade," Proc. SPIE 10583, Extreme Ultraviolet (EUV) Lithography IX, 105830R (Presented at SPIE Advanced Lithography: February 27, 2018; Published: 19 March 2018); https://doi.org/10.1117/12.2295800.5754447633001.
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