Inside the body, most of the energy content come from the low-frequency vibrations (less than 50 Hz). Having high natural frequency is a major problem in Microelectromechanical systems (MEMS) energy harvesters. Considering the small size of the EN, 1 ܿ݉cm3, the natural frequency is expected to be high. In our design, the natural frequency is lowered significantly by using a buckled beam. A mass is also used in the middle of the beam to decrease the natural frequency even more. Since the beam is buckled, the design is bistable and nonlinear which increases the output power.
In this paper, the natural frequencies and mode shapes of the EN are analytically derived. The geometric nonlinearities are included in the electromechanical coupled governing equations. The governing equations are solved and it is shown that the device generates sufficient electricity to power biomedical sensors and devices inside the human body.