In this paper, we introduce a novel extrinsic Fabry-Perot interferometer (EFPI)-based optical fiber inclinometer for tilt measurements with 0.015 μrad resolution. The reported inclinometer consists of an EFPI sensor, which is formed between endfaces of a suspended rectangular mass block and a fixed optical fiber, packaged inside a rectangular container box with an oscillation dampening device. Importantly, the two reflectors of the EFPI sensor remain parallel while the cavity length of EFPI sensor meters a change in tilt. The sensor design and the measurement principle are discussed. An experiment based on measuring the tilt angle of a simply-supported beam induced by a small load is presented to verify the resolution and accuracy of a prototype inclinometer.
Yiyang Zhuang and Jie Huang, "A pendulum based optical fiber inclinometer with nanoradian resolution (Conference Presentation)," Proc. SPIE 10598, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2018, 105982C (Presented at SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring: March 08, 2018; Published: 27 March 2018); https://doi.org/10.1117/12.2296603.5759118837001.
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