MEMS piezoelectric energy harvester (PEH) has been widely designed in cantilever beam style because of ease of fabrication and effective to generate large strain and output power. There are already several studies on tapered beam shapes to improve the overall performance of energy harvested. In this paper, we investigate cantilever beam type PEH in rectangular, trapezoidal and triangle shapes, and the devices are limited to the area smaller than 1cm × 1 cm for better flexibility in applications. The power output and the life time of each shape of devices are fabricated and characterized. The output power are tested with optimal resistance loads, and the output power are 145.3 μW, 125.3 μW and 107.8 μW for triangle, trapezoidal and rectangular shapes of devices respectively under excitation of 0.5g acceleration vibration level in the resonant frequency of the transducer. The tip displacements of the 3 devices are 3.05 mm, 2.66 mm, and 2.44 mm for triangular, trapezoidal and rectangular shape devices, respectively. To study the lifetime and durability issue, triangular and rectangular devices are excited under 0.2g to 1g for 24 hours. The resonant frequency shifting, tip displacement and open circuit voltage changing are monitored will be detailed in the paper.
C. T. Chen, Y. H. Fu, W. H. Tang, S. C. Lin, and W. J. Wu, "The output power improvement and durability with different shape of MEMS piezoelectric energy harvester," Proc. SPIE 10602, Smart Structures and NDE for Industry 4.0, 106020N (Presented at SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring: March 06, 2018; Published: 27 March 2018); https://doi.org/10.1117/12.2295313.
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