Controlling for uniformity of an optical coating becomes increasingly difficult for optics with steep curvatures over a large aperture. The growth of a film will inevitably be affected as a function of deposition angle. By exploiting the porosity of a film grown at oblique angles, its refractive index can be tailored to specific applications. An anti-reflective coating deposited on a tilted Corning High-Purity Fused Silica (HPFS) 7980 substrate was characterized for surface and cross-sectional morphologies, crystalline structures, and spectroscopic homogeneity.
Christopher J. Chinhong, James E. Platten, Michael J. D'Lallo, and Thomas E. Gebo, "Characterization of glancing angle deposited (GLAD) optical coatings for UV applications," Proc. SPIE 10627, Advanced Optics for Defense Applications: UV through LWIR III, 106270F (Presented at SPIE Defense + Security: April 15, 2018; Published: 8 May 2018); https://doi.org/10.1117/12.2310004.
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