This paper reports an electrothermal MEMS mirror-based LiDAR system. The MEMS mirror has a low driving voltage of 9 V and a large mirror aperture of 2 mm in diameter. The working range of this system is 80 to 250 cm with a distance resolution of 7.2 cm. The complete LiDAR prototype can fit into a small volume of 100 mm×100 mm×60 mm with the weight under 100 g. The use of such a MEMS mirror can greatly reduce the weight, size and power of LiDAR modules, making it possible for small UAVs to carry LiDAR for accurate navigation.
Dingkang Wang, Stephan Strassle, Aaron Stainsby, Yunkai Bai, Sanjeev Koppal , and Huikai Xie, "A compact 3D lidar based on an electrothermal two-axis MEMS scanner for small UAV," Proc. SPIE 10636, Laser Radar Technology and Applications XXIII, 106360G (Presented at SPIE Defense + Security: April 18, 2018; Published: 10 May 2018); https://doi.org/10.1117/12.2304529.
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